Capacitive sensors from MicroSense offer the lowest noise performance of any commercially available capacitive sensor, achieving nanometer and even picometer resolution. Several types of sensors are available - these "application specific" capacitive position sensors are optimized for either high stability and linearity or highest measurement bandwidth for fast response.
MicroSense, LLC.(USA)
http://www.microsense.net
- Achieve picometer resolution with highest resolution position sensor MicroSense 6800 Series
- Lowest noise sensor achieves picometer resolution. State-of-the-art design provides high resolution with increased standoff from the sensor to the target.
- High resolution with high bandwidth position sensor MicroSense 5800 Series
- Designed for high dynamic applications - high resolution with measurement bandwidth up to 100 kHz. Reliably measure even poorly grounded targets such as air bearing spindles and motors.
- High resolution with excellent stability position sensor MicroSense 8800 Series
- Designed for best linearity and stability, with measurement bandwidth up to 20 kHz - ideal for servo system position feedback and fast tool servo applications. Ultra low noise design, sub-nanometer resolution.
- High resolution with high accuracy position sensor MicroSense 4800 Series
- Designed for best linearity and stability, the 4800 series is our most versatile all around position sensor.
- Capacitive Position Sensor for Nanopositioning MicroSense Mini
- A compact, cost effect nanopositioning sensor for Original Equipment Manufacturers - ideal for use in piezo driven flexure stages and other short travel nanopositioners.
- Accurately Measure Error Motion of Precision Spindle Spindle Metrology System
- Ideal for measurement of repeatable run out and non-repeatable run out of spindle and other precision, rotating mechanisms.
