The stages achieves a flatness of motion of 10nm over 10 mm, meeting the needs of atomic force microscopes and positioning systems that require extended range of motion with tight out-of-plane error tolerances.

Invenios, Inc.(USA)
http://www.invenios.com

Upgrade Kits for AFM InvenioFlex

InvenioFlex are designed to address demanding leading edge nanopositioning applications. The stages are able to carry relatively large payloads (500g) with sub-nanometer precision and stability.